Title: Analyses of post metal etch cleaning in downstream H2O-based plasma followed by a wet chemistry
Authors: Li, H ×
Baklanov, Mikhaïl
Boullart, Werner
Conard, Thierry
Brijs, Bert
Maex, Karen
Froyen, Ludo #
Issue Date: 1999
Series Title: Journal of the Electrochemical Society vol:146 issue:10 pages:3843-3851
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Physical Metallurgy and Materials Engineering Section (-)
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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