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Title: Study of the early stage kinetics of SOI formation in stimulated regimes
Authors: Litovchenko, V
Romanyuk, B
Efremov, A
Melnik, V
Claeys, Cor
Vanhellemont, Jan
Issue Date: 1999
Conference: Symposium E of the European Materials Research Society 1999 Spring Meeting; June 1-4, 1999; Strasbourg, France.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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