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Title: Galvanic corrosion testing of WCxNy barrier metal in H202 based slurries
Authors: Ernur, Didem ×
Schuhmacher, Jörg
Terzieva, Valentina
Shamiryan, Denis
Maex, Karen #
Issue Date: 2003
Host Document: pages:95-101
Conference: Proceedings of the Advanced Metallization Conference 2002 location:Leuven Belgium date:01/10/02
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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