Title: Efficient pore sealing crucial for future interconnects
Authors: Van Bavel, Mieke ×
Beyer, Gerald
Iacopi, Francesca
Abell, Thomas
Shamiryan, Denis
Iacopi, Francesca
Maex, Karen
Shamiryan, Denis
Maex, Karen #
Issue Date: 2004
Series Title: Future Fab issue:16 pages:111-114
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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