Title: Analysis of selectively grown epitaxial Si1-xGex by spectroscopic ellipsometry and comparison with RBS and SIMS
Authors: Loo, Roger ×
Caymax, Matty
Libezny, Milan
Blavier, G
Brijs, Bert
Geenen, Luc
Vandervorst, Wilfried #
Issue Date: 1999
Host Document: pages:170-179
Conference: Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes; Joint proceedings of the symposia on: location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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