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Title: Ni- and Co-based silicides for advanced CMOS applications
Authors: Kittl, Jorge
Lauwers, Anne
Chamirian, Oxana
Van Dal, Mark
Akheyar, Amal
de Potter de ten Broeck, Muriel
Lindsay, Richard
Maex, Karen #
Issue Date: 2003
Series Title: Microelectronic Engineering vol:70 issue:02/04/07 pages:158-165
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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