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Title: Thickness scaling issues of Ni-silicide
Authors: Chamirian, Oxana ×
Kittl, Jorge
Lauwers, Anne
Richard, Olivier
Van Dal, Mark
Maex, Karen #
Issue Date: 2003
Series Title: Microelectronic Engineering vol:70 issue:02/04/07 pages:201-208
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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