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Title: Silicide scaling: Co, Ni or CoNi ?
Authors: Lauwers, Anne ×
Kittl, Jorge
Akheyar, Amal
Van Dal, Mark
Chamirian, Oxana
de Potter de ten Broeck, Muriel
Lindsay, Richard
Maex, Karen #
Issue Date: 2003
Publisher: ECS
Conference: Advanced Short-Time Thermal Processing for Si-based CMOS devices location:Paris France date:27/04/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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