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Title: Sidewall grooving on CoSi2 narrow lines
Authors: Chamirian, Oxana ×
de Potter de ten Broeck, Muriel
Lauwers, Anne
Richard, Olivier
Lindsay, Richard
Vrancken, Christa
Maex, Karen #
Issue Date: 2003
Publisher: ECS
Conference: Advanced Short-Time Thermal Processing for Si-based CMOS devices location:Paris France date:27/04/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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