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|ITEM METADATA RECORD
|Title: ||Co-silicide, Co(Ni)-silicide and Ni-silicide to source/drain contact resistance|
|Authors: ||Akheyar, Amal ×|
de Potter de ten Broeck, Muriel
Van Dal, Mark
Maex, Karen #
|Issue Date: ||2003 |
|Conference: ||Advanced Short-Time Thermal Processing for Si-based CMOS devices location:Paris France date:27/04/03|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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