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Title: Co-silicide, Co(Ni)-silicide and Ni-silicide to source/drain contact resistance
Authors: Akheyar, Amal ×
Lauwers, Anne
Kittl, Jorge
de Potter de ten Broeck, Muriel
Chamirian, Oxana
Jonckheere, Rik
Leunissen, Peter
Van Dal, Mark
Lindsay, Richard
Tempel, Georg
Maex, Karen #
Issue Date: 2003
Publisher: ECS
Conference: Advanced Short-Time Thermal Processing for Si-based CMOS devices location:Paris France date:27/04/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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