Title: Challenges for structural stability of ultra-low-k based interconnects
Authors: Iacopi, Francesca
Brongersma, Sywert
Vandevelde, Bart
Travaly, Youssef
Maex, Karen
Issue Date: 2003
Conference: ASME Materials and Mechanics Conference location:Scottsdale, AZ, USA date:17/06/03
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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