|ITEM METADATA RECORD
|Title: ||Challenges for structural stability of ultra-low-k based interconnects|
|Authors: ||Iacopi, Francesca|
|Issue Date: ||2003 |
|Conference: ||ASME Materials and Mechanics Conference location:Scottsdale, AZ, USA date:17/06/03|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.