Title: CD control using SiON BARL processing for sub-0.25µm lithography
Authors: Zhang, Fenghong ×
Op de Beeck, Maaike
Schaekers, Marc
Ronse, Kurt
Conley, W
Gopalan, P
Gangala, Hareen K
Dusa, M
Bendik, Joe #
Issue Date: 1999
Series Title: Microelectronic Engineering vol:46 issue:01/04/07 pages:51-54
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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