Title: The ADEQUAT project for development and transfer of 0.25?m logic complementary metal-oxide-semiconductor modules
Authors: De Keersmaecker, Roger ×
Declerck, Gilbert
Félix, P
Haond, M
Hill, C
Janssen, G
Lorenz, J
Maes, Herman
Montree, Andre
Neppl, F
Patruno, P
Rudan, M
Ryssel, H
Van den hove, Luc
Vandervorst, Wilfried
van Ommen, A #
Issue Date: 1994
Series Title: J. Vac. Sci. Technol. B vol:12 issue:4 pages:2852-2859
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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