Title: Ultra-Thin Gate Oxide Yield and Reliability
Authors: Depas, Michel
Vermeire, Bert
Mertens, Paul
Meuris, Marc
Heyns, Marc #
Issue Date: 1994
Conference: Symposium on VLSI Technology location:Leuven Belgium date:09/06/94
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Department of Materials Engineering - miscellaneous
Surface and Interface Engineered Materials
# (joint) last author

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