Title: A new dummy-free shallow trench isolation concept for mixed-signal applications
Authors: Badenes, Gonçal ×
Rooyackers, Rita
Augendre, Emmanuel
Vandamme, Ewout
Perello, Carles
Heylen, Nancy
Grillaert, Joost
Deferm, Ludo #
Issue Date: 2000
Series Title: Journal of the Electrochemical Society vol:147 issue:10 pages:3287-3282
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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