Title: Recent Results from Imec on Hydrogen Passivation
Authors: El Gamel, Hussam
Nijs, Johan
Mertens, Robert
Issue Date: 1994
Conference: 4th Workshop on the Role of Point Defects / Defect Complexes in Silicon Device Processing; 1994; USA. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:ESAT - ELECTA, Electrical Energy Computer Architectures

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