Title: U.V. Activated Cleaning Using NO, HCl and NO/HCl
Authors: Elsmore, Chris ×
Gluck, Ronald
Carr, Philip
Meuris, Marc
Mertens, Paul
Heyns, Marc #
Issue Date: 1994
Host Document: pages:125-129
Conference: Proceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS); September 19-21, 1994; Bru
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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