Title: Characterisation of Cu surface cleaning by downstream N2/H2 plasma
Authors: Baklanov, Mikhaïl
Shamiryan, Denis
Beyer, Gerald
Conard, Thierry
Vanhaelemeersch, Serge
Maex, Karen
Issue Date: 2000
Conference: Advanced Metallization Conference; October 2000; San Diego, CA, USA.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science