Title: Low temperature oxidation and selective etching of chemical vapor deposition a-SiC:H films
Authors: Baklanov, Mikhaïl ×
Van Hove, Marleen
Mannaert, Geert
Vanhaelemeersch, Serge
Bender, Hugo
Conard, Thierry
Maex, Karen #
Issue Date: 2000
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:18 issue:3 pages:1281-1287
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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