Title: Development of a new type of SiGe thin strain relaxed buffer based on the incorporation of a carbon-containing layer
Authors: Delhougne, Romain ×
Meunier-Beillard, Philippe
Caymax, Matty
Loo, Roger
Vandervorst, Wilfried #
Issue Date: 2003
Host Document: pages:115-116
Conference: Book of Abstracts ISTDM - 1st International SiGe Technology and Device Meeting location:Leuven Belgium date:15/01/03
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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