Title: Process and properties of ALD tungsten nitride carbide barrier films for interconnects
Authors: Schuhmacher, Jörg ×
Travaly, Youssef
Beyer, Gerald
Stokhof, Maarten
Schaekers, Marc
Maex, Karen #
Issue Date: 2004
Publisher: MRS
Host Document: pages:755-759
Conference: Advanced Metallization Conference 2003 location:Leuven Belgium date:21/10/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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