Title: Dual silicide technology: WSix polycide gate and self-aligned CoSi2 source/drain
Authors: Franssila, Samuli ×
Palmans, Roger
Stone, M
Maex, Karen #
Issue Date: 1994
Host Document: pages:287-290
Conference: ESSDERC'94. Proceedings of the 24th European Solid State Device Research Conference; 11-15 September 1994; Edinburgh, UK. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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