Title: In-line electrical metrology for high-k gate dielectrics deposited by atomic layer CVD
Authors: De Witte, H ×
Passefort, Sophie
Besling, Wim
Maes, J
Eason, K
Young, Edward
Rittersma, Chris
Heyns, Marc #
Issue Date: 2003
Series Title: Journal of the Electrochemical Society vol:150 issue:9 pages:F169-F172
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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