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Title: Advanced solutions for copper and low k technology
Authors: Beyer, Gerald
Baklanov, Mikhaïl
Brongersma, Sywert
De Roest, David
Donaton, R
Grillaert, Joost
Lanckmans, Filip
Maenhoudt, Mireille
Maex, Karen
Richard, Emmanuel
Struyf, Herbert
Stucchi, Michele
Tokei, Zsolt
Van Hove, Marleen
Vervoort, Iwan
Issue Date: 2000
Conference: Semicon Europe; 2000; München, Germany. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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