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|ITEM METADATA RECORD
|Title: ||Advanced solutions for copper and low k technology|
|Authors: ||Beyer, Gerald|
De Roest, David
Van Hove, Marleen
|Issue Date: ||2000 |
|Conference: ||Semicon Europe; 2000; München, Germany. location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Electrical Engineering - miscellaneous|
Associated Section of ESAT - INSYS, Integrated Systems
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