Title: Studies of Cu surfaces modified by thermal and plasma treatments
Authors: Beyer, Gerald
Baklanov, Mikhaïl
Conard, Thierry
Maex, Karen
Issue Date: 2000
Conference: MRS Spring Meeting 2000. Symposium D: Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics; 2 location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.