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Title: Rapid thermal anealing of electro chemically plated Cu films
Authors: Beyer, Gerald ×
Kitabijan, P
Brongersma, Sywert
Proost, Joris
Bender, Hugo
Richard, Emmanuel
Vervoort, Iwan
Hey, P
Zhang, P
Maex, Karen #
Issue Date: 2000
Host Document: pages:167-171
Conference: Advanced Metallization Conference 1999 (AMC 1999); location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Department of Materials Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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