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|ITEM METADATA RECORD
|Title: ||Rapid thermal anealing of electro chemically plated Cu films|
|Authors: ||Beyer, Gerald ×|
Maex, Karen #
|Issue Date: ||2000 |
|Host Document: ||pages:167-171|
|Conference: ||Advanced Metallization Conference 1999 (AMC 1999); location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Department of Materials Engineering - miscellaneous|
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author|
# (joint) last author|
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