|ITEM METADATA RECORD
|Title: ||Dopant characterization techniques (atomic and carrier concentration, potential distribution)|
|Authors: ||Vandervorst, Wilfried|
|Issue Date: ||2003 |
|Conference: ||Ultra Shallow Junctions: 7th Internat. Worksh. on the Fabrication, Characterization & Modeling of Ultra Shallow Doping Profiles location:Leuven Belgium date:27/04/03|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Electrical Engineering - miscellaneous|
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