Title: Dopant characterization techniques (atomic and carrier concentration, potential distribution)
Authors: Vandervorst, Wilfried
Issue Date: 2003
Conference: Ultra Shallow Junctions: 7th Internat. Worksh. on the Fabrication, Characterization & Modeling of Ultra Shallow Doping Profiles location:Leuven Belgium date:27/04/03
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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