Title: Assessment of the near-surface profiling capabilities of SIMS
Authors: Vandervorst, Wilfried ×
Janssens, Tom
Fruehauf, Jens
Ross, I.M
Cullis, A
Vandenberg, J.A
Bergmaier, A
Dollinger, G #
Issue Date: 2003
Host Document: pages:165
Conference: Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic. location:Leuven Belgium date:27/04/03
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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