Title: Optical extensions integration for a 0.314-µm2 45-nm node 6-transistor SRAM cell
Authors: Verhaegen, Staf ×
Nackaerts, Axel
Wiaux, Vincent
Hendrickx, Eric
Vandenberghe, Geert #
Issue Date: 2005
Publisher: SPIE
Host Document: pages:120-130
Conference: Design and Process Integration for Microlithography III location:Leuven Belgium date:27/02/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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