Title: On the recovery of simulated plasma process induced damage in high-k dielectrics
Authors: O'Sullivan, Barry ×
Pantisano, Luigi
Roussel, Philippe
Degraeve, Robin
Groeseneken, Guido
De Gendt, Stefan
Heyns, Marc #
Issue Date: Mar-2006
Publisher: IEEE
Conference: 44th Annual IEEE International Reliability Physics Symposium Proceedings location:Leuven Belgium date:26/03/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Molecular Design and Synthesis
Department of Materials Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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