|ITEM METADATA RECORD
|Title: ||Ultra Clean Processing Technologies: Advanced Si-Surface Preparation Techniques|
|Authors: ||Heyns, Marc|
Gräf, D #
|Issue Date: ||1994 |
|Conference: ||Isolators and Minienvironments. Scottish Society for Contamination Control; November 9, 1994; Glasgow, UK. location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Clinical Residents Medicine|
Department of Materials Engineering - miscellaneous
Surface and Interface Engineered Materials
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