Title: Ultra Clean Processing Technologies: Advanced Si-Surface Preparation Techniques
Authors: Heyns, Marc
Meuris, Marc
Mertens, Paul
Hurd, Trace
Schmidt, Harald
Verhaverbeke, Steven
Hatcher, Z
Gräf, D #
Issue Date: 1994
Conference: Isolators and Minienvironments. Scottish Society for Contamination Control; November 9, 1994; Glasgow, UK. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Department of Materials Engineering - miscellaneous
Surface and Interface Engineered Materials
# (joint) last author

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