Title: Trends in wafer-level packaging of MEMS
Authors: Baert, Kris ×
De Moor, Piet
Tilmans, Harrie
John, Joachim
Witvrouw, Ann
Van Hoof, Chris
Beyne, Eric
Van Bavel, Mieke #
Issue Date: Oct-2003
Series Title: Onboard Technology issue:Oct. pages:48-51
Publication status: published
KU Leuven publication type: AT-p
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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