|ITEM METADATA RECORD
|Title: ||Impact of the dielectric charging on the electrostatic actuation of deformable clamped-clamped beams|
|Authors: ||Rottenberg, Xavier|
De Wolf, Ingrid
De Raedt, Walter
Tilmans, Harrie #
|Issue Date: ||Jun-2005 |
|Host Document: ||Proceedings of MEMSWAVE pages:101-102|
|Conference: ||Proceedings of MEMSWAVE date:23 June 2005|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||ESAT- TELEMIC, Telecommunications and Microwaves|
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