Title: Impact of the dielectric charging on the electrostatic actuation of deformable clamped-clamped beams
Authors: Rottenberg, Xavier
De Wolf, Ingrid
Nauwelaers, Bart
De Raedt, Walter
Tilmans, Harrie #
Issue Date: Jun-2005
Publisher: EFPL
Host Document: Proceedings of MEMSWAVE pages:101-102
Conference: Proceedings of MEMSWAVE date:23 June 2005
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT- TELEMIC, Telecommunications and Microwaves
# (joint) last author

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