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|ITEM METADATA RECORD
|Title: ||High performing 8 Å EOT HfO2/TaN low thermal-budget n-channel FETs with solid-phase epitaxially regrown (SPER) junctions|
|Authors: ||Ragnarsson, Lars-Ake|
Johnson, Kevin D.
De Meyer, Christina
De Gendt, Stefan
|Issue Date: ||2006 |
|Conference: ||International Solid-State Circuits Conference location:Leuven Belgium date:05/02/06|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Electrical Engineering - miscellaneous|
Associated Section of ESAT - INSYS, Integrated Systems
Molecular Design and Synthesis
Department of Materials Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
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