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Title: High performing 8 Å EOT HfO2/TaN low thermal-budget n-channel FETs with solid-phase epitaxially regrown (SPER) junctions
Authors: Ragnarsson, Lars-Ake
Severi, Simone
Trojman, Lionel
Brunco, David
Johnson, Kevin D.
Delabie, Annelies
Schram, Tom
Tsai, Wilman
Groeseneken, Guido
De Meyer, Christina
De Gendt, Stefan
Heyns, Marc
Issue Date: 2006
Conference: International Solid-State Circuits Conference location:Leuven Belgium date:05/02/06
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
Molecular Design and Synthesis
Department of Materials Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors

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