ITEM METADATA RECORD
Title: Cleaning Technology for Highly Reliable Gate Oxides
Authors: Heyns, Marc ×
Meuris, Marc
Verhaverbeke, Steven
Mertens, Paul
Schmidt, Harald
Rotondaro, Antonio
Hurd, Trace
Hatcher, Z
Gräf, D #
Issue Date: 1994
Host Document: pages:59-66
Conference: Proceedings of the International Conference on Advanced Microelectronic Devices and Processing; March 3-5, 1994; Sendai, Japan. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
× corresponding author
# (joint) last author

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