Title: Metal Removal without Particle Addition: Optimization of the Dilute HCl Clean
Authors: Hurd, Trace
Mertens, Paul
Hall, L. H
Heyns, Marc #
Issue Date: 1994
Conference: Proceedings 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS); September 19-21, 1994; Brugge, Be
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Department of Materials Engineering - miscellaneous
Surface and Interface Engineered Materials
# (joint) last author

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