Title: The Role of Hydrogen Peroxide in the SC2 Clean
Authors: Hurd, Trace
Mertens, Paul
Schmidt, Harald
Ditter, D
Hall, L. H
Meuris, Marc
Heyns, Marc #
Issue Date: 1994
Conference: Institute of Environmental Science 40th Annual Technical Meeting Proceedings; May 1-6, 1994; Chicago, IL, USA.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Department of Materials Engineering - miscellaneous
Surface and Interface Engineered Materials
# (joint) last author

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