Title: On the characterization of the strain field of lattice defects in silicon with nanometer resolution
Authors: Janssens, Koenraad ×
Van der Biest, Omer
Vanhellemont, Jan
Maes, Herman #
Issue Date: 1994
Host Document: pages:22-24
Conference: Defect Recognition and Image Processing in Semiconductors and Devices; 6-10 Sept. 1993; Santander, Spain. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Physical Metallurgy and Materials Engineering Section (-)
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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