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Title: Substrate injection induced ultrafast degradation in HfO2/TaN/TiN gate stack MOSFET
Authors: Ranjan, R ×
Pey, K.L
Tung, C.H
Ang, D.S
Tang, L.J
Kauerauf, Thomas
Degraeve, Robin
Groeseneken, Guido
De Gendt, Stefan
Bera, L.K #
Issue Date: 2006
Host Document: pages:259-262
Conference: International Electron Devices Meeting - IEDM. Technical Digest location:Singapore date:11/12/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous
Molecular Design and Synthesis
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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