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Title: Phase effects and short gate length device implementation of Ni fully-silicided (FUSI) gates
Authors: Kittl, Jorge
Kmieciak, Malgorzata
Lauwers, Anne
Demeurisse, Caroline
Hoffmann, Thomas Y
Veloso, Anabela
Kottantharayil, Anil
Kubicek, Stefan
Niwa, Masaaki
Van Dal, Mark
Richard, Olivier
Jurczak, Malgorzata
Vrancken, Christa
Chiarella, Thomas
Brus, Stephan
Maex, Karen
Biesemans, Serge #
Issue Date: 2006
Series Title: Microelectronic Engineering vol:83 issue:11/12/07 pages:2117-2121
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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