Title: Ion-implantation issues in the formation of shallow junctions in germanium
Authors: Simoen, Eddy ×
Satta, Alessandra
D'Amore, Antonio
Janssens, Tom
Clarysse, Trudo
Martens, Koen
De Jaeger, D
Benedetti, Alessandro
Hoflijk, Ilse
Brijs, Bert
Meuris, Marc
Vandervorst, Wilfried #
Issue Date: Aug-2006
Publisher: Pergamon
Series Title: Materials Science in Semiconductor Processing vol:9 issue:4-5 pages:634-639
ISSN: 1369-8001
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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