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Title: Self-aligned CoSi2 for 0.18mm and below
Authors: Maex, Karen
Lauwers, A
Besser, Paul
Kondoh, Eiichi
de Potter de ten Broeck, Muriel
Steegen, An #
Issue Date: 1999
Series Title: IEEE Transactions on Electron Devices vol:46 issue:7 pages:1545-1550
ISSN: 0018-9383
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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