Title: A novel hydraulic microactuator sealed by surface tension
Authors: De Volder, MichaĆ«l ×
Peirs, Jan
Reynaerts, Dominiek
Coosemans, Johan
Puers, Robert
Smal, Olivier
Raucent, Benoît #
Issue Date: Sep-2005
Publisher: Elsevier science sa
Series Title: Sensors and actuators a-physical vol:123-24 pages:547-554
Abstract: In order to improve the power density of microactuators, recent research focuses on the applicability of fluidic power at microscale. The main encountered difficulties in the development of small fluidic actuators are related to production tolerances and assembly requirements. Furthermore, these actuators tend to comprise highly three-dimensional parts, which are incompatible with traditional microproduction technologies. This paper presents accurate production and novel assembly techniques for the development of a hydraulic microactuator. In addition, a scalable low friction seal, relying on surface tension forces, is presented. A prototype piston-type microactuator with a bore of I mm and a length of 13 mm is developed. Using a gallium-based surface tension seal, pressures of more than 90 kpa have been sealed without leakage. (C) 2005 Elsevier B.V. All rights reserved.
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Production Engineering, Machine Design and Automation (PMA) Section
Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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