|ITEM METADATA RECORD
|Title: ||Boosted RF-MEMS capacitive shunt switches|
|Authors: ||Rottenberg, X|
De Raedt, W
Tilmans, H.A.C #
|Issue Date: ||29-Nov-2002 |
|Host Document: ||Workshop on Semiconductor Sensor and Actuator Technology (3rd SeSens) pages:667-671|
|Conference: ||Workshop on Semiconductor Sensor and Actuator Technology ( SeSens) edition:3 location:Veldhoven, the Netherlands date:29 November 2002|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||ESAT- TELEMIC, Telecommunications and Microwaves|
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