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Title: Simulations and measurements of capacitance in dielectric stacks and consequences for integration
Authors: De Roest, David
Donaton, R.A
Stucchi, M
Maex, Karen
Nauwelaers, Bart
Issue Date: 28-Feb-2000
Host Document: Proceedings European Workshop Materials for advanced Metallization (MAM 2000) pages:38-39
Conference: European Workshop Materials for Advanced Metallization (MAM ) location:Stresa, Italy date:28 February-1 March 2000
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT- TELEMIC, Telecommunications and Microwaves
Associated Section of ESAT - INSYS, Integrated Systems

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