ITEM METADATA RECORD
Title: Unusual diffusion and precipitation behavior of Ni and Cu in Si upon elevated temperature implantation
Authors: Langouche, Guido
Wu, M F
De Wachter, J
Pattyn, Hugo
Van Bavel, A-M
Issue Date: 1994
Publisher: Trans Tech Publications
Host Document: Materials Science Forum vol:143-147 pages:803-808
Conference: 17th International Conference on Defects in Semiconductors location:Gmunde, Austria date:18-23 July 1993
ISBN: 0-87849-671-8
ISSN: 0255-5476
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Nuclear and Radiation Physics Section

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