Title: Unusual diffusion and precipitation behavior of Ni and Cu in Si upon elevated temperature implantation
Authors: Langouche, Guido ×
Wu, M F
De Wachter, J
Pattyn, Hugo
Van Bavel, A-M #
Issue Date: 1994
Series Title: Materials Science Forum vol:143-147 pages:803-808
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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