SID Symposium Digest of Technical Papers: Proceedings of Eurodisplay, Date: 2015/01/01 - 2015/01/09, Location: Ghent Belgium
Publication date:
2015-01-01
Volume:
46
Pages:
55 -
ISSN:
9781510833104
SID Symposium Digest of Technical Papers: Proceedings of Eurodisplay
Author:
Nag, Manoj
Steudel, Soeren ; Smout, Steve ; Bhoolokam, Ajay ; Genoe, Jan ; Cobb, Brian ; Kumar, Abhishek ; Groeseneken, Guido ; Heremans, Paul
Abstract:
© 2015 Society for Information Display. In this work, we present the impact of S/D contact formation, that is. by SiN plasma doping (hydrogen incorporation), metallic reduction (by calcium) and by argon plasma (compositional change) on NBIS instabilities of self aligned a-IGZO TFTs.