Pattern transfer challenges of the Sequential Infiltration Synthesis (SIS) of of Directed Self-Assembly (DSA) for line/space applications

42nd Micro- and Nano-Engineering - MNE, Date: 2016/01/01 - 2016/01/09, Location: Vienna Austria

Publication date: 2016-01-01

42nd Micro- and Nano-Engineering - MNE

Pattern transfer challenges of the Sequential Infiltration Synthesis (SIS) of of Directed Self-Assembly (DSA) for line/space applications

Author:

Chan, BT

Singh, Arjun ; Luong, Vinh ; Parnell, Doni ; Yamashita, Fumiko ; Gronheid, Roel ; de Marneffe, Jean-Francois ; Piumi, Daniele