ITEM METADATA RECORD
Title: Mitigation of plasma-induced damage in porous low-k dielectrics by cryogenic precursor condensation
Authors: Zhang, Liping ×
de Marneffe, Jean-Francois
Leroy, Floriane
Lefaucheux, Philippe
Tillocher, Thomas
Dussart, Remi
Maekawa, Kaoru
Yatsuda, Koichi
Dussarrat, Christian
Goodyear, Andy
Cooke, Mike
De Gendt, Stefan
Baklanov, Mikhail R #
Issue Date: 2016
Publisher: Institute of Physics and IOP Publishing
Series Title: Journal of Physics D, Applied Physics vol:49 issue:17 pages:175203-175217
ISSN: 0022-3727
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

Files in This Item:
File Description Status SizeFormat
JPD_cryogenic etch.pdf Published 2183KbAdobe PDFView/Open Request a copy

These files are only available to some KU Leuven Association staff members

 




All items in Lirias are protected by copyright, with all rights reserved.

© Web of science