Title: Characterization of Patterned Porous Low-k Dielectrics: Surface Sealing and Residue Removal by Wet Processing/Cleaning
Authors: Le, Q. T ×
Kesters, E
Decoster, Stijn
Chan, B. T
Nguyen, M. P
Conard, T
Vanleenhove, A
Holsteyns, F
De Gendt, Stefan #
Issue Date: 2016
Publisher: Electrochemical Society, Inc.
Series Title: ECS Journal of Solid State Science and Technology vol:5 issue:3 pages:N5-N9
ISSN: 2162-8769
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Work, Organisational and Personnel Psychology
Molecular Design and Synthesis
× corresponding author
# (joint) last author

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